Thermal conductivity of titanium nitride/titanium aluminum nitride multilayer coatings deposited by lateral rotating cathode arc

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Samani, M. K., X. Z. Ding, S. Amini, N. Khosravian, J. Y. Cheong, George C. K. Chen, and B. K. Tay. “Thermal Conductivity of Titanium Nitride Titanium Aluminum Nitride Multilayer Coatings Deposited by Lateral Rotating Cathode Arc”. Article. Thin Solid Films. Faculty Publications. https://doi.org/10.1016/j.tsf.2013.04.029.

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